Mems-based optical image stabilization

ABSTRACT

In one example, a camera is provided that includes: a plurality of MEMS electrostatic comb actuators, each actuator operable to exert a force on at least one lens; and an optical image stabilization (OIS) algorithm module operable to command the plurality of actuators to actuate the at least one lens responsive to motion of the camera.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. Patent Application No.13/247,906, filed Sep. 28, 2011, which is hereby incorporated byreference in its entirety.

TECHNICAL FIELD

This disclosure relates, in general, to optical devices, and moreparticularly, to a MEMS-based image stabilization system.

BACKGROUND

The explosive growth of cell phone cameras with features such as zoom,auto focus, and high resolution has threatened to make thepoint-and-shoot digital camera obsolete. But as such miniature camerasmigrate to ever higher megapixel density and zoom capabilities, theresulting image quality suffers from shaky human hands. Indeed, it isphysically impossible for a human user to hold a camera still even whenconsciously trying in that human hands have a natural tremor that peaksin the range of 7 to 11 Hz. This roughly 10 Hz shaking of the camerawill have more and more effect on the image quality depending upon theexposure time and also the angular field-of-view for each image pixel.The increase of pixel density in cell phone cameras introduces more andmore image blur from camera jitter as a result.

Thus, MEMS-based motion sensors for digital cameras has been developedto address the image degradation that results from human hand tremor.For example, MEMS-based gyroscopes may be used to sense camera motion.In response to the sensed motion, an image stabilization system attemptsto move the lens or the image sensor to minimize or eliminate theresulting motion-induced blurring of the image. However, the resultingactuation is performed using conventional actuators.

Accordingly, there is a need in the art for MEMS-based imagestabilization systems.

SUMMARY

In accordance with a first aspect of the disclosure, a camera isprovided that includes: a plurality of electrostatic actuators; and anoptical image stabilization (OIS) algorithm module operable to commandthe plurality of actuators to actuate the at least one lens responsiveto motion of the camera.

In accordance with a second aspect of the disclosure, a method of imagestabilization is provided that includes: sensing a motion of a camera;based upon the sensed motion, determining a desired lens actuation thatstabilizes a camera lens; translating the desired lens actuation intodesired tangential actuations; and tangentially actuating the at leastone lens using a plurality of tangential actuators according to thedesired tangential actuations.

In accordance with a third aspect of the disclosure, a system isprovided that includes: a lens; a stage holding the lens within a curvedaperture; three tangential actuators symmetrically disposed about thestage, each tangential actuator operable to displace the stage in adirection tangential to a curve defined by the curved aperture; and anoptical image stabilization (OIS) algorithm module operable to derive anactuation command for each of the three tangential actuators responsiveto motion of the camera.

A better understanding of the above and many other features andadvantages of the novel actuator devices of the present disclosure andthe several methods of their use can be obtained from a consideration ofthe detailed description of some example embodiments thereof below,particularly if such consideration is made in conjunction with theappended drawings, wherein like reference numerals are used to identifylike elements illustrated in one or more of the figures thereof.

BRIEF DESCRIPTION OF THE FIGURES OF THE DRAWINGS

FIG. 1 is a plan view of an example image stabilization device thatutilizes tangential actuation;

FIGS. 2A-2F are vector diagrams illustrating the use of the exampleimage stabilization device of FIG. 1 to effect in-plane translationaland rotational movement of an optical element;

FIG. 3 is a perspective view of an actuator in the device of FIG. 1;

FIG. 4A is a partial plan view of the interdigitated fingers for a combin the actuator of FIG. 3, showing the fingers before the actuator isdeployed for operational use;

FIG. 4B is a partial plan view of the interdigitated fingers for a combin the actuator of FIG. 3, showing the fingers after the actuator hasbeen deployed;

FIG. 4C is a partial plan view of the interdigitated fingers for a combin the actuator of FIG. 3, after the comb has been biased to anoperating position;

FIG. 5 is a plan view of an actuator latch of FIG. 3, showing variousstages in its engagement with the actuator lever;

FIGS. 6A-6C are vector diagrams illustrating in-plane rotationalmovement of a stage of the device of FIG. 1 between a “parked” state andan “operating” state;

FIG. 7 is a block diagram of an image stabilization system usingtangential actuators;

FIG. 8 is a block diagram of an embodiment of the system of FIG. 7 inwhich the optical image stabilization algorithm is implemented in adriver integrated circuit;

FIG. 9 illustrates more details for the driver integrated circuit ofFIG. 8;

FIG. 10 is a flowchart for the image stabilization process performed bythe system of FIGS. 8 and 9;

FIG. 11 is a block diagram of an embodiment of the system of FIG. 7 inwhich the optical image stabilization algorithm is implemented in animage processor integrated circuit;

FIG. 12 illustrates more details for the driver and image processorintegrated circuits of FIG. 11; and

FIG. 13 is a flowchart for the image stabilization process performed bythe system of FIGS. 11 and 12.

DETAILED DESCRIPTION

Electrostatic MEMS-based lens actuation is exploited to provide anefficient image stabilization system. In one embodiment, as few as threeactuators may be disposed about an optical element such as a lens toeffect image stabilization by exploiting tangential actuation. Turningnow to the drawings, an image stabilization fixture 100 includes an acentral aperture 105 defined by a circular mounting stage 110 forreceiving an optical element such as a lens or group of lenses (notillustrated). Three actuators, designated as an actuator 1, an actuator2, and an actuator 3, are symmetrically disposed about aperture 105.Each actuator actuates stage 110 in a tangential fashion. In otherwords, a linear displacement 120 introduced by each actuator defines avector direction that is tangential to a circle enclosing an aperturecenter 118. For example, linear displacements 120 are tangential to thecircle defined by mounting stage 110.

The resulting tangential actuation is better understood with regard to aCartesian coordinate system defined at center 118 of aperture 105. Stage110 and actuators 1, 2, and 3 lie in a plane defined by the x and ydirections. A z direction projects normally from the plane at center118. As used herein, a tangential displacement is said to be positivefor each actuator as indicated by directions 115. Each actuator is thuscapable of a positive and a negative displacement in that regard. Asseen in FIG. 2A, if actuators 1, 2, and 3 each introduce an equaldisplacement, with actuators 1 and 2 being tangentially negative andactuator 3 being tangentially positive, the resulting tangentialactuation of stage 110 is in the positive x direction. Conversely, ifall the actuators 1 and 2 are positive while actuator 3 is equallynegative, the resulting tangential actuation of stage 110 is in thenegative x direction as shown in FIG. 2C. Alternatively, if actuator 3is left neutral, actuator 1 actuates negatively a given amount, andactuator 2 actuates positively in the same amount, the net actuation ofstage 110 is in the positive y direction as shown in FIG. 2B.Conversely, if actuator 3 is left neutral but the positive and negativedisplacements switched for actuators 1 and 2 switched as shown in FIG.2D, the net actuation of stage 110 is in the negative y direction. Inthis fashion, tangential actuation can effect any desired amount of xand y displacement for stage 110 within the travel limits of theactuators.

Tangential actuation can also introduce a rotation of stage 110 aboutthe z axis. For example, if actuators 1, 2 and 3 each introduce an equalamount of negative displacements, the net actuation of stage 110 is aclockwise rotation (negative θ) in FIG. 2E. Conversely, if theactuations of FIG. 2E are all reversed as shown in FIG. 2Fm such thatall tangential actuations are positive, the net actuation of stage 110is a counter-clockwise z axis rotation (positive θ). In this fashion,stage 110 may be both translated as desired in the x and y plane as wellas rotated in the θ direction.

The tangential displacement introduced by each actuator 1 through 3 maybe represented in a local coordinate system. For example, the x-directedtangential displacement for actuator 3 may be designated as displacementin the L₃ direction with the same positive convention as represented bydirection 115 of FIG. 1. Similarly, the tangential displacements foractuators 1 and 2 may be represented by local linear coordinates L₁ andL₂, respectively. The displacement in dimension L₁ from actuator 1, thedisplacement in L₂ from actuator 2, and the displacement in L₃ fromactuator 3 may all be related to the translation in the x and ydimensions for stage 110 as well as a rotation in θ for stage 110depending upon the radial distance R from center 118 to the effectivetangential actuation point for each actuator. In that regard, it may beshown that a coordinate transformation is as follows:

$L_{1} = {{R\; {Sin}\; \theta} - {\frac{1}{2}X} + {\frac{\sqrt{3}}{2}Y}}$$L_{2} = {{R\; {Sin}\; \theta} - {\frac{1}{2}X} + {\frac{\sqrt{3}}{2}Y}}$L₃ = R Sin θ + X

The above coordinate transformations assume that the lens neutralposition is at the origin but may be modified accordingly if the neutralposition is displaced from the origin. Using these coordinatetransformations, a detected translation in the x,y plane or rotation ofstage 110 resulting from jitter or other unintended physical disturbanceof the camera may be addressed through a corresponding tangentialactuation.

Any suitable actuator may be used to construct actuators 1, 2, and 3such as a comb actuator or a gap-closing actuator. A biased combactuator offers attractive travel characteristics such as +/−50 micronsand may be implemented such as discussed in commonly-assigned U.S.application Ser. No. 12/946,670 (the '670 application), filed Nov. 15,2010, the contents of which are incorporated by reference. In such anembodiment, each actuator has a fixed portion 121 and a moveable portion122. In image stabilization device 100 of FIG. 1, fixed portion 121integrates with an outer frame 125 and includes a plurality of fixedcomb supports 112 that extend radially towards moveable portion 122.Similarly, moveable portion 122 includes a plurality of comb supports113 that extend radially toward fixed portion 121. Comb supports 112 and113 alternate with each other to support a plurality of combs 114. Forillustration clarity, combs 114 are not shown in FIG. 1 but instead areshown in a closeup view in FIG. 4A through 4C.

As seen in more detail in FIG. 3, each actuator 1 through 3 drives stage110 through a corresponding flexure 106. To allow movement from opposingactuators, each flexure 106 may be relatively flexible in the radialdirection while being relatively stiff in the tangential direction(corresponding to linear displacements 120 of FIG. 1). For example,flexure 106 may comprise a V-shaped folded flexure having a longitudinalaxis aligned in the tangential direction. Such a V-shaped flexurepermits a radial flexing yet is relatively stiff with regard todisplacements 120. In this fashion, a “pseudo-kinematic” placement forstage 110 is achieved that precisely locates center 118 in a rest stateyet achieves the desired x-y plane translation and θ rotation duringimage stabilization.

Manufacture of combs 114 using a MEMS process yet achieving a biaseddeployed state for actuators 1 through 3 may be accomplished using alinear deployment such as discussed in the '670 application. As seen inthe closeup view of FIG. 4A, the interdigitated fingers making up eachcomb 114 may be manufactured in a fully interdigitated state. In otherwords, the fingers for comb 114 are initially disposed such that theassociated fixed and moveable comb supports 112 and 113 are spaced apartby approximately the length of the fingers in comb 114. Accordingly, theapplication of a voltage differential across comb 114 in the un-deployedstate of FIG. 4A would not result in any in-plane rectilinear movementof stage 110 relative to frame 125, and hence, any corresponding X, Y orθ movement of a lens coupled to the former. To allow room for actuation,each comb 114 should be spread apart and deployed as shown in FIG. 4B

As illustrated in FIG. 4B, in one embodiment, this deployment can beeffected by moving the comb support 113 (and hence, movable portion 122of FIG. 1) in the direction of an arrow 400 to a deployed position thatis coplanar with, parallel to and spaced at a selected distance apartfrom the associated fixed comb support 112, and then fixing moveableportion 122 in the deployed position for substantially coplanar,rectilinear movement with regard to fixed portion 121. As illustrated inFIG. 4C, when thus deployed, the application and removal of a suitablevoltage differential across comb 114 will result in a substantiallyrectilinear and coplanar movement of the resiliently supported moveableportion 122 toward and away from fixed portion 121 as indicated by adouble-headed arrow 402, and hence, a corresponding X, Y and/or θZmovement of an element coupled to stage 110.

There are several different methods and apparatus for deploying moveableportion 122 to the deployed position as well as for locking or fixing itin the deployed position. For example, as seen in FIG. 3 a deploymentmethod involves a coplanar over-center latch 300 and a fulcrum 304 onframe 125. Latch 300 is coupled to frame 125 with a latch flexure 306. Acoplanar deployment lever 308 is coupled to moveable portion 122 througha deployment flexure 310. Deployment lever 308 has a cam surface 312that is configured to engage with latch 300. In addition, lever 308 hasa notch for engaging with fulcrum 304 for rotational movement of thelever with regard to fulcrum 304.

In an example deployment, an acceleration pulse is applied to moveableportion 122 in the direction of an arrow 314 while holding the frame 125static as shown in FIG. 3. This pulse causes deployment lever 308 torotate about fulcrum 304 towards latch 300. The rotation of thedeployment lever 308 about the fulcrum 304 causes cam surface 312 toengage latch 300 as seen in FIG. 5, Initially, lever 308 is in anun-deployed position 501 but begins to rotate into intermediate position502 such that cam surface 312 biases latch 300 and stretches latchflexure 306. Deployment flexure 310 is shown mostly cutaway forillustration clarity. Continued rotation of lever 308 allows latchflexure 306 to pull latch 300 back down to latch lever 308 into alatched position 503. To produce the acceleration pulse that rotateslever 308 and displaces moveable portion 122, a small needle or anotherMEMS device may be inserted into a pull ring 315 (FIG. 3) and actuatedaccordingly. In an alternative embodiment, moveable portion 122 may bedeployed using capillary action such as described in commonly-assignedU.S. application Ser. No. 12/946,657, filed Nov. 15, 2010, the contentsof which are incorporated by reference. Similarly, alternativedeployment and latching structures and methods are described in the '670application.

The deployment and latching may result in combs 114 being relativelyfully opened as shown in FIG. 4B, In such a position, combs 114 caneffectively only be contracted as opposed to being expanded. In thatregard, both a contraction and an expansion is desirable to get bothpositive and negative tangential movements as discussed above withregard to actuators 1, 2, and 3. A default state during imagestabilization may thus involve some degree of voltage being appliedacross combs 114 to achieve the intermediate interdigitation as shown inFIG. 4C. In this fashion, should the comb voltage be lowered below thedefault operating voltage level of FIG. 4C, comb 114 will expand.Conversely, should the comb voltage be increased with regard to thedefault operating level, comb 114 will contract. In this manner, bothpositive and negative actuation may be applied by actuators 1, 2, and 3as indicated by arrow 405.

Prior to application of the default voltage across combs 114, theactuators may be in a “beginning-of travel,” “power-off” or “parked”state. In the parked state, image stabilization in inoperative butcenter 118 is unaffected, As discussed with regard to FIG. 2F, anappropriate displacement for each of actuators 1, 2, and 3 produces apositive rotation in θ but no x-y plane translation. Such a displacementat each comb 114 is thus sufficient to go from the deployed but inactivestate shown in FIG. 4 b to the default operating state of FIG. 4C. FIG.6A shows the rotation from actuators 1, 2, and 3 to go from the parkedstate to the active optical image stabilization state, As illustrated inFIG. 6B, after combs 114 have been biased to their operating voltages,selectively applying controlled increases or decreases in the respectiveoperating voltages for each of the actuators 1, 2, and 3 will result ina deterministic movement of stage 110 (and hence center 118) asdiscussed above in connection with FIGS. 2A-2F. To save on power whenimaging is not being performed, actuators 1, 2, and 3 may again beparked into their inactive states as shown in FIG. 6C. Additionalfeatures for actuators 1, 2, and 3 are described in concurrently filedU.S. application Ser. No. 13/247,895, entitled Optical ImageStabilization Using Tangentially Actuated MEMS Devices, the contents ofwhich are incorporated by reference in their entirety.

A block diagram for a control system 700 to control image stabilizationusing tangential actuation is shown in FIG. 7. In image stabilization,it is conventional to distinguish between intended motion of the cameraas opposed to unintended jitter. For example, a user may be deliberatelymoving a camera through a 90 degree range of motion to image differentsubjects. Should this deliberate movement not be detected, the imagestabilization system would have the impossible and undesirable task ofrotating the lens 90 degrees to compensate for such intended motion. Oneway to distinguish unintended jitter of the camera is to use employ atracking loop that predicts the intended motion of a camera. In oneembodiment, control system 700 includes a tracking filter such a Kalmanfilter 705 that predicts a current lens position based uponpreviously-measured camera movement.

Kalman filter 705 needs some measure of camera motion to make aprediction of what is intended movement of the camera as opposed tounintended jitter. Thus, an inertial sensor such as a MEMS-basedgyroscope 710 measures the velocity of some reference point on thecamera such as aperture center 118 discussed previously. The x,y planevelocities for center 118 as obtained from pitch and yaw measurementsfrom gyroscope 710 may be designated as x_(g) and y_(g), respectively.Such inertial measurements may be supplemented by motion estimatesobtained from analyzing the camera image. Thus, a camera image processor720 may also make an estimate for the x,y plane velocities for center118, which may be designated as x_(c) and y_(c), respectively. TheKalman filter receives the velocity estimates from gyroscope 710 andcamera image processor 720 to filter them so as to make a prediction ofthe x, y plane velocity for lens center 118 accordingly. This Kalmanfilter predication for the reference location velocities in the x,yplane may be designated as x₀ and y₀, respectively. The velocityestimates are filtered through high pass filters 725 to remove gyroscopedrift and integrated in integrators 730 and multiplied by an appropriatescale factor in amplifiers 735 to obtain position estimates 740. In thatregard, estimates 740 represent what Kalman filter 705 predicts as theintended position of lens center 118 without the presence of jitter. Anydifference between estimates 740 and the actual lens position is treatedas jitter and should be compensated for by image stabilization controlsystem 700. It will be appreciated that embodiments of control system700 may be implemented that do not include such a predicted trackingloop. For example, the inertial measurements from gyroscope 710 may bemerely high-pass filtered to provide a cruder estimate of the intendedcamera velocities. Such velocity estimates may be integrated asdiscussed above to obtain position estimates 740.

To obtain the actual lens position (or equivalently, the position ofsome reference point such as center 118), each actuator is associatedwith a position sensor. For example, actuator 1 may be associated with aposition sensor 741 that senses the L₁ displacement discussed earlier.In that regard, position sensor 741 may sense the capacitance acrosscombs 114 to make an estimate of the L₁ displacement. Alternatively,other type of position sensors may be used such as Hall sensors.Similarly, actuators 2 and 3 are associated with corresponding positionsensors 742 and 743. Position sensor 742 thus senses the L₂ displacementwhereas sensor 743 senses the L₃ displacement. These senseddisplacements may then be digitized in corresponding analog-to-digitalconverters 745 and presented to a coordinate translator 750. Thetangential actuations L₁ through L₃ may be converted into a sensedposition x_(s), y_(s) by inverting the equations discussed previouslywith θ equaling zero. The difference between the sensed position and theKalman-filter-predicated position is then determined using adders 755.The outputs from adders 755 may then be filtered in controllers 760 andcompensators 765 to get the resulting x and y coordinates of where thelens should be actuated to compensate for the jitter of the camera.

A translator 770 translates the x and y coordinates into tangentialcoordinates L₁, L₂, and L₃ as described in the equation above with θequaling zero. The outputs from translator 770 thus represents thedesired actuation of actuators 1 through 3. The Kalman filter predictionand generation of the resulting desired actuation takes place at arelatively slow data rate in that significant calculation is necessary.But the actual actuation to drive actuators 1 through 3 to the desireddegree of actuation may take place at a relatively high data rate. Thus,a demarcation 771 in FIG. 7 indicates the partition of a digital domainfor control system 700 into relatively high and relatively low datarates. Similarly, a demarcation 772 indicates the partition of controlsystem 700 into digital and analog domains.

The difference between the desired degree of actuation and the actualactuation of actuators 1, 2, and 3 may be determined using correspondingadders. A corresponding controller 780 then determines an appropriatecontrol signal for its actuator accordingly. The resulting digitalcontrol signals may then be converted into analog control signals usingdigital to analog converters (DACs) 790. As known in the art, anelectrostatic comb actuator typically requires boosted voltage levelssuch as obtained through charge pumps. Thus, each actuator 1 through 3is driven by a corresponding driver circuit 790 responsive to the analogcontrol signals produced in DACs 790. In this fashion, control system700 can uses gyroscope 710 that is sensing camera motion in theCartesian x,y plane to advantageously achieve image stabilization usingjust three tangential MEMS actuators.

Image stabilization using system 700 may be implemented using a numberof alternative embodiments. In that regard, the aggregation of digitalcomponents and signal paths from Kalman filter 705 through translators770 and 750 may be designated as an OIS algorithm module. The OISalgorithm module may be implemented in various integrated circuitarchitectures. As shown in FIG. 8, one embodiment of a camera 800includes an OIS algorithm module 805 within a MEMS driver integratedcircuit (IC) 810. Camera 800 includes MEMS tangential actuators forimage stabilization as discussed above as well as actuators forautofocus (AF) purposes and zooming purposes. These MEMS actuators areshown collectively as a MEMS module 815. Driver IC 810 drives MEMSmodule 815 with AF commands 820 from an AF driver 830 as well asin-plane tangential actuation commands 825 from an optical imagestabilization (OIS) driver 835. MEMS module 815 includes positionssensors such as discussed with regard to FIG. 7 so that driver IC 810may receive in-plane tangential actuator positions 840.

A bus such as an I²C bus 845 couples driver IC 810 to other cameracomponents. However, it will be appreciated that other bus protocols maybe utilized. In camera 800, gyroscope 710, imager 720, an imageprocessor 850, and a micro controller unit (MCU) 855 all couple to I²Cbus 845. Since the I²C protocol is a master-slave protocol, the locationof module 805 in driver IC 810 provides lower latency as will bedescribed further herein. FIG. 9 shows the resulting control loops forcamera 800. The bus master may be either the ISP or the MCU asrepresented by master module 900. OIS algorithm module 805 is asimplified version in that the tracking filter is omitted and theintended motion of the camera approximated by high pass filtering 910the pitch and yaw rates from gyroscope 710. Because the data flow on amaster-slave bus is always from slave-to-master or from master-to-slave,the rotation rates from gyroscope 710 first flow to master module 900and then to driver IC 810. Master module 900 controls both gyroscope 710and driver IC 810 in that regard. For illustration clarity, just asingle combined channel is shown for OIS algorithm module 805. Thus, atranslator 920 represents translators 770 and 750 of FIG. 7. The actualand desired lens positions are translated within translator 920 withrespect to a lens neutral position 925.

The resulting data traffic on bus 845 is shown in FIG. 10. Imagestabilization necessarily draws some current and thus it is desirable toonly commence image stabilization while a user is taking a digitalphotograph. At that time, the OIS data traffic begins in an initial step1000 with master module 900 as the I²C bus master. At that time,gyroscope 710 may begin taking inertial measurements of camera movementand OIS driver 835 may command MEMS actuators 815 to transition from aparked to an active state as represented by step 1005. Master module 900then reads 6 bytes of gyroscopic data in a step 1010 so that the datamay be written to driver IC in a step 1015. OIS algorithm module 805 canthen determine the appropriate amount of actuation to address the camerajitter in a step 1020. If the user has finished taking digitalphotographs as determined in a step 1025, the process ends at step 1030.Otherwise, steps 1010 through 1025 are repeated. The communication timefor one cycle (steps 1010 through 1020) depends upon the bus clockperiod and the data width. If bus 845 can accommodate 3 bytes in eachclock cycle of 10 μs, the cycle time is 10 μs*2*6*8+the algorithmcalculation time for step 1020, which equals 0.96 ms+the algorithmcalculation time.

An alternative control architecture is shown in FIG. 11 in which OISalgorithm module 805 is located within ISP 850, Similar to FIG. 9, anautofocus algorithm module 940 in ISP 850 controls AF driver 830 indriver IC 810. Driver IC 810, gyroscope 710, imager 720, ISP 850 and MCU855 all communicate using I²C bus 845. FIG. 12 shows the resultingcontrol loops. OIS algorithm module 805 is again a simplified version inthat the tracking filter is omitted and the intended motion of thecamera approximated by high pass filtering 910 the pitch and yaw ratesfrom gyroscope 710. ISP 850 controls both gyroscope 710 and driver IC810. For illustration clarity, just a single combined channel is shownfor OIS algorithm module 805.

The resulting data traffic on bus 845 for the embodiment of FIGS. 11 and12 is shown in FIG. 13. In response to invocation of an active picturetaking mode, the OIS data traffic begins in an initial step 1300 withISP 850 as the I²C bus master. Alternatively, MCU 855 may act as themaster. Concurrent or subsequent to step 1300, gyroscope 710 may begintaking inertial measurements of camera movement and OIS driver 835 maycommand MEMS actuators 815 to transition from a parked to an activestate as represented by step 1305. ISP 850 then reads 6 bytes ofgyroscopic data in a step 1310. In addition, ISP 855 reads the currentlens position as six bytes of data from translator 920 in a step 1315.OIS algorithm module 805 can then determine the appropriate amount ofactuation to address the camera jitter in a step 1320 whereupon ISP 855may write to driver IC accordingly with a six-byte actuation command ina step 1325. If the user has finished taking digital photographs asdetermined in a step 1330, the process ends at step 1335. Otherwise,steps 1310 through 1325 are repeated. The communication time for onecycle (steps 1310 through 1325 depends upon the bus clock period and thedata width. If bus 845 can accommodate 3 bytes in each clock cycle of 10μs, the cycle time is 10 μs*3*6*8+the algorithm calculation time forstep 1320, which equals 1.44 ms+the algorithm calculation time. Thus,locating OIS algorithm module 805 in IC driver 810 as discussedpreviously is faster in a master-slave bus protocol system. In contrast,locating OIS algorithm 805 in ISP 850 requires an extra step of datamovement.

As those of some skill in this art will by now appreciate and dependingon the particular application at hand, many modifications, substitutionsand variations can be made in and to the materials, apparatus,configurations and methods of use of the actuator devices of the presentdisclosure without departing from the spirit and scope thereof, and inlight this, the scope of the present disclosure should not be limited tothat of the particular embodiments illustrated and described herein, asthey are merely by way of some examples thereof, but rather, should befully commensurate with that of the claims appended hereafter and theirfunctional equivalents.

1. (canceled)
 2. A camera, comprising: a plurality of electrostaticactuators configured to move at least one lens to implement imagestabilization; a fixed portion on which the plurality of electrostaticactuators are supported to surround the at least one lens, wherein eachof the plurality of electrostatic actuators comprises a movable portionconfigured to move, relative to the fixed portion, between a firstposition, in which the actuator is operable, and a second position, inwhich the actuator is non-operable; and a latch configured to latch themovable portion in the first position.
 3. The camera of claim 2, whereineach actuator is configured to exert a tangential force on the at leastone lens, and wherein the plurality of actuators tangentially actuatethe at least one lens in response to a motion of the camera.
 4. Thecamera of claim 3, further comprising: a plurality of position sensorscorresponding to the plurality of actuators, each position sensormeasuring a tangential displacement of its corresponding actuator; and atranslator module operable to translate the tangential displacementsfrom the position sensors into a displacement for the lens.
 5. Thecamera of claim 2, wherein the movable portion is configured to latch tothe first position when an accelerated pulse is applied to the movableportion.
 6. The camera of claim 2, wherein the plurality of actuatorsare further configured to rotate the at least one lens when theplurality of actuators actuate the at least one lens tangentially incoordination.
 7. The camera of claim 2, wherein the camera is integratedinto a cellular telephone.
 8. The camera of claim 7, wherein theactuators are electrostatic comb actuators.
 9. The camera of claim 8,further comprising a circular stage to receive the at least one lens,wherein the plurality of actuators comprises three actuators evenlyspaced around the circular stage.
 10. The camera of claim 2, whereineach of the plurality of actuators comprises a flexure connecting eachactuator to the at least one lens, wherein the flexure is more flexiblein a radial direction away from the at least one lens than in a lineardirection tangent to the at least one lens.
 11. The camera of claim 10,wherein the flexure is folded and has a V-shape with a longitudinal axisaligned in the linear direction.
 12. The camera of claim 2, furthercomprising a gyroscope configured to measure a pitch and yaw of thecamera, wherein the plurality of actuators actuate the at least one lensbased on the pitch and yaw of the camera.
 13. An actuator, comprising: aplurality of electrostatic actuators configured to move at least onelens to implement image stabilization, wherein each actuator isconfigured to tangentially actuate the at least one lens in response toa motion of the actuator; a fixed portion on which the plurality ofelectrostatic actuators are supported to surround the at least one lens,wherein each of the plurality of electrostatic actuators comprises amovable portion configured to move, relative to the fixed portion,between a first position, in which the actuator is operable, and asecond position, in which the actuator is non-operable; and a latchconfigured to latch the movable portion in the first position.
 14. Theactuator of claim 13, further comprising a coplanar deployment leverconfigured to pivot about a fulcrum at the movable portion, wherein thecoplanar deployment lever pivots to engage the latch when the movableportion moves to the first position.
 15. The actuator of claim 14,wherein the coplanar deployment lever comprises a cam surface configuredto engage the latch when the movable portion is in the first position.16. The actuator of claim 14, wherein the latch comprises a coplanarover-center latch configured to receive the cam surface of the coplanardeployment lever.
 17. The actuator of claim 16, wherein the coplanarover-center latch comprises a latch flexure configured to bias thecoplanar over-center latch toward a lock position locking the coplanardeployment lever in the first position.
 18. A system, comprising: alens; a stage holding the lens within a curved aperture; threeintegrally formed tangential actuators symmetrically disposed about thestage in a fixed portion, each tangential actuator operable to displacethe stage in a direction tangential to a curve defined by the curvedaperture, wherein each tangential actuator comprises a movable portionconfigured to move, relative to the fixed portion, between a firstposition, in which the tangential actuator is operable, and a secondposition, in which the tangential actuator is not operable; and a latchconfigured to latch the movable portion in the first position.
 19. Thesystem of claim 18, wherein the curved aperture is a circle and thecurve defined by the curved aperture is a circle.
 20. The system ofclaim 18, further comprising three V-shaped flexures corresponding tothe three tangential actuators, wherein each tangential actuator couplesto the stage through the corresponding V-shaped flexure.
 21. The systemof claim 20, wherein each V-shaped flexure has a longitudinal axisaligned in the direction tangential to the curve.